ACT, Inc.
Cryopump rebuild service.Providing service worldwide.
E-Mail: info@kk-actech.com
About ACT, Inc.
ACT, Inc. established in 2013, has service location in Kumamoto and head office in Fuchu, Tokyo, Japan.ACT, Inc. offers cryopump rebuilding capabilities for all major cryopump brands and almost all models.
ACT, Inc. committed to providing the finest parts and workmanship to your cryopump rebuilding.
We take great pride in every piece of equipment that leaves our shop.
CRYOPUMP rebuild service
ACT, Inc. offers quality and budget prices cryopump rebuilding service for all major cryopump brands and almost all models, from conventional product to newest one.ACT, Inc. offers complete cryopump rebuilding capabilities for OB-IS, P-300, SHI Sicera model and others.
Exchange pumps may be available, depending on inventory.
ACT, Inc. also offer about the following.
- Cold Trap rebuild.
- De-contamination and Cryo panel cleaning for Ion implanter equipment.
- Cryo pump repair.
There are two options in Cryopump rebuild service and the customer can choose it according to needs.
1. Standard overhaul (STD OH)
- Refrigerator rebuild ⇒ Replacement of maintenance repair kit, such as all elastomers products and components subject to wear, include bearings, O-Rings, valve body, seals, spring, 1st and 2nd Displacer seals.- Replacement of 2nd displacer lead shot.
- Performance test ⇒ Refrigerator performance test is verified specifications.
Test data is attached and shipped with the cryopump.
- Warranty period ⇒ One year after delivery to the refrigerator performance.
2. Full overhaul (Full OH)
- Implementation of STD OH.- Vacuum side panel cleaning and re-plating, if necessary.
- Replacement of charcoal with new one on the 15K array.
- Performance test ⇒ Cryopump performance test is verified specifications.
Test data is attached and shipped with the cryopump.
- Warranty period ⇒ One year after delivery to the cryopump performance.
